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锂氮化锂表面声波设备的制造
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JoVE Journal Engineering
Fabrication of Surface Acoustic Wave Devices on Lithium Niobate
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锂氮化锂表面声波设备的制造

DOI:
10.3791/61013-v

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07:55 min

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June 18, 2020

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, ,
1Medically Advanced Devices Laboratory, Center for Medical Devices and Instrumentation, Department of Mechanical and Aerospace Engineering, Jacobs School of Engineering and Department of Surgery, School of Medicine,University of California San Diego

Chapters

  • 00:04Introduction
  • 00:28SAW Device Fabrication Via Lift-Off Method
  • 03:21SAW Device Fabrication Via Wet Etching Method
  • 05:59Results: SAW Devices Generate Surface Acoustic Waves
  • 07:18Conclusion

Summary

Automatic Translation

Automatic Translation

在压电基板上生产数字电极传感器（镍氢锂）时，介绍了两种制造技术，即升降和湿蚀刻，这种传感器广泛用于产生表面声波，现在在微到纳米级流体中具有广泛的效用。作为生产的电极被显示，以有效地诱导兆赫顺序雷利表面声波。

Tags

Surface Acoustic WaveLithium NiobateFabricationPhotoresistSpin CoatingUV ExposureRD6 DeveloperSputteringChromiumAluminum

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