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Journal / Engineering / Deposition of Bi2Te3 and Sb2Te3 Thin Films on… / ガラス基板上へのBi2Te3およびSb2Te3熱電薄膜の高周波マグネトロンスパッタリング…
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Engineering

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JoVE Journal Engineering
ガラス基板上へのBi2Te3およびSb2Te3熱電薄膜の高周波マグネトロンスパッタリング
 
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ガラス基板上へのBi2Te3およびSb2Te3熱電薄膜の高周波マグネトロンスパッタリング

Deposition of Bi2Te3 and Sb2Te3 Thin Films on Glass Substrates via RF Sputtering

Article DOI: 10.3791/201298-v • 03:39 min • May 17th, 2024
May 17th, 2024 •
1, 1, 1, 1, 2, 1
1Solar Energy Research Institute (SERI), Universiti Kebangsaan Malaysia, 2Faculty of Science and Technology, Universiti Sains Islam Malaysia

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エンジニアリング、207号、
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