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Fabrication of Nanopillar-Based Split Ring Resonators for Displacement Current Mediated Resonances in Terahertz Metamaterials
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JoVE Journal Engineering
Fabrication of Nanopillar-Based Split Ring Resonators for Displacement Current Mediated Resonances in Terahertz Metamaterials

Fabrication of Nanopillar-Based Split Ring Resonators for Displacement Current Mediated Resonances in Terahertz Metamaterials

DOI:
10.3791/55289-v

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10:28 min

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March 23, 2017

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, , ,
1Department of Electrical and Computer Engineering,University of Minnesota

Chapters

  • 00:00Title
  • 03:36Au Electroplating and ALD Al2O3
  • 06:27Pattern C-shape SRRs
  • 07:51Results: Au Nanopillar-based SRRs with 10 nm Al2O3 Gaps
  • 09:40Conclusion

Summary

Automatic Translation

Automatic Translation

A protocol for the design and fabrication of a novel nanopillar-based split ring resonator (SRR) is presented.

Tags

Keywords: NanopillarSplit Ring ResonatorTerahertz MetamaterialsDisplacement CurrentGold ElectroplatingAtomic Layer DepositionHigh Quality FactorFrequency ShiftSensorsFrequency-agile DevicesMicrofabricationHigh Aspect Ratio Nanostructures

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