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基于纳米柱裂环谐振器的研制为位移电流共振介导太赫兹超材料

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Engineering
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JoVE Journal Engineering

Fabrication of Nanopillar-Based Split Ring Resonators for Displacement Current Mediated Resonances in Terahertz Metamaterials

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基于纳米柱裂环谐振器的研制为位移电流共振介导太赫兹超材料

DOI:

10.3791/55289-v

•

10:28 min

•

March 23, 2017

•

Chao Liu, Joseph Schauff, Seokhyeong Lee, Jeong-Hyun Cho

¹Department of Electrical and Computer Engineering,University of Minnesota

Chapters

00:00Title
03:36Au Electroplating and ALD Al₂O₃
06:27Pattern C-shape SRRs
07:51Results: Au Nanopillar-based SRRs with 10 nm Al₂O₃ Gaps
09:40Conclusion

Summary

Automatic Translation

一个设计和一个新的基于纳米柱，开口环谐振器（SRR）的制造协议提出。

Tags

Keywords: Nanopillar Split Ring Resonator Terahertz Metamaterials Displacement Current Gold Electroplating Atomic Layer Deposition High Quality Factor Frequency Shift Sensors Frequency-agile Devices Microfabrication High Aspect Ratio Nanostructures

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