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JoVE Journal Engineering

Instrument Calibration, Experimental Setup, and Parameter Tuning for Semiconductor Wafer Topography Imaging with AFM

Measurements of Waves in a Wind-wave Tank Under Steady and Time-varying Wind Forcing

Journal (Engineering)

Measurements of Waves in a Wind-wave Tank Under Steady and Time-varying Wind Forcing

Experimental Procedure for Laboratory Studies of In Situ Burning : Flammability and Burning Efficiency of Crude Oil

Journal (Engineering)

Experimental Procedure for Laboratory Studies of In Situ Burning : Flammability and Burning Efficiency of Crude Oil

Instrument Calibration, Experimental Setup, and Parameter Tuning for Semiconductor Wafer Topography Imaging with AFM

Parallel Active Cantilever Arrays in AFMS to Enable High-Throughput Inspections

Article DOI: 10.3791/200439-v • 03:41 min • June 13th, 2023

June 13th, 2023 •

Fangzhou Xia¹, Kamal Youcef-Toumi¹, Thomas Sattel², Eberhard Manske³, Ivo W. Rangelow^4,5

¹Mechatronics Research Lab, Department of Mechanical Engineering, Massachusetts Institute of Technology, ²Mechatronics Group, Department of Mechanical Engineering, Ilmenau University of Technology, ³Production and Precision Measurement Technology Group, Institute of Process Measurement and Sensor Technology, Ilmenau University of Technology, ⁴Nanoscale Systems Group, Institute of Process Measurement and Sensor Technology, Ilmenau University of Technology, ⁵nano analytik GmbH

Tags

Active Probe Atomic Force Microscopy Quattro-Parallel Cantilever Arrays High-Throughput Large-Scale Sample Inspection Atomic Force Microscope Nanoscale Surface Studies 3D Topography Images Imaging Throughput High-speed AFM Systems Dynamic Process Videos Chemical And Biological Reactions Semiconductor Wafers Nanofabricated Structures Nanoscale Spatial Resolution Imaging Static Sample High Productivity Passive Cantilever Probe Optical Beam Deflection System Imaging Throughput Active Cantilevers Embedded Piezoresistive Sensors Thermomechanical Actuators Parallel Operation Imaging Throughput Large-range Nano-positioners Control Algorithms Data-driven Post-processing Algorithms

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