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Parallel Active Cantilever Arrays in AFMS to Enable High-Throughput Inspections

June 13th, 2023
1, 1, 2, 3, 4,5
1Mechatronics Research Lab, Department of Mechanical Engineering, Massachusetts Institute of Technology, 2Mechatronics Group, Department of Mechanical Engineering, Ilmenau University of Technology, 3Production and Precision Measurement Technology Group, Institute of Process Measurement and Sensor Technology, Ilmenau University of Technology, 4Nanoscale Systems Group, Institute of Process Measurement and Sensor Technology, Ilmenau University of Technology, 5nano analytik GmbH

Summary
Automatic Translation

Storskala prøveinspeksjon med nanoskalaoppløsning har et bredt spekter av applikasjoner, spesielt for nanofabrikerte halvlederskiver. Atomkraftmikroskoper kan være et flott verktøy for dette formålet, men er begrenset av deres bildehastighet. Dette arbeidet benytter parallelle aktive utkragarrayer i AFM-er for å muliggjøre inspeksjoner med høy gjennomstrømning og stor skala.

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