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Journal / Chemistry / 金属氧化物结构的气溶胶辅助化学气相沉积:…
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金属氧化物结构的气溶胶辅助化学气相沉积
 
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金属氧化物结构的气溶胶辅助化学气相沉积: 氧化锌棒

Article DOI: 10.3791/56127-v • 06:39 min • September 14th, 2017
September 14th, 2017 •
1,2, 3, 4, 1, 1
1Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), 2SIX Research Centre, Brno University of Technology, 3Institute of Physics of Material, Academy of Science of Czech Republic, 4Institute of Physical Engineering and Central European Institute of Technology, Brno University of Technology

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在不使用 pre-deposited 催化剂-种子颗粒的情况下, 通过气溶胶辅助化学气相沉积法合成柱状氧化锌结构。这种方法是可伸缩和兼容的各种基板的基础上, 无论是硅, 石英或聚合物。

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化学 问题 127 氧化锌 柱状结构 棒 AACVD 催化生长 蒸气-固体机制
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