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Engineering

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JoVE Journal Engineering
Focused Ion Beam Fabrication of LiPON-based Solid-state Lithium-ion Nanobatteries for In Situ Testing
 

Focused Ion Beam Fabrication of LiPON-based Solid-state Lithium-ion Nanobatteries for In Situ Testing

Article DOI: 10.3791/56259-v • 10:58 min • March 7th, 2018
March 7th, 2018 •
*1, *2, 1,2, 3
1Department of NanoEngineering, University of California San Diego, 2Materials Science and Engineering Program, University of California San Diego, 3Amrita Centre for Nanosciences and Molecular Medicine, Amrita Vishwa Vidyapeetham University
* These authors contributed equally

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résumé
Automatic Translation

A protocol for the fabrication of electrochemically active LiPON-based solid-state lithium-ion nanobatteries using a focused ion beam is presented.

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Focused Ion Beam Fabrication LiPON-based Solid-state Lithium-ion Nanobatteries In Situ Testing Dual Beam-focused Ion Beam System Electrochemically Active Thin Film Nanobatteries In Situ Electrochemical Cycling Solid-state Electrochemistry Solid-solid Interfaces Thermodynamic Stability Electrochemical Stability Dynamic Processes Tarascon Group Thin Film Battery Cross-section In Situ Characterization Sample Preparation Aluminous Substrate Structure Schematic Platinum Cathode Current Collector Lithium Cobalt Oxide Cathode Lithium Phosphorus Oxynitride Electrolyte Amorphous Silicone Anode Copper Anode Current Collector Dual Scanning Electron Microscope
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