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Mg₃N₂和 Zn₃N₂薄膜的等离子辅助分子束外延生长

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Plasma-Assisted Molecular Beam Epitaxy Growth of Mg₃N₂ and Zn₃N₂ Thin Films

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Mg₃N₂和 Zn₃N₂薄膜的等离子辅助分子束外延生长

DOI:

10.3791/59415-v

•

13:05 min

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May 11, 2019

•

Peng Wu, Thomas Tiedje

¹Department of Electrical and Computer Engineering,University of Victoria

Capitoli

00:00Titolo
00:57MgO Substrate Preparation
01:50Operation of VG V80 MBE
02:13Substrate Loading
04:04Metal Flux Measurements
05:59Nitrogen Plasma
06:51In-situ Laser Light Scattering
08:35Growth Rate Determination
09:13Risultati
10:46Conclusion

Summary

Traduzione automatica

本文介绍了以N2气体为氮源和光生长监测的等离子体辅助分子束外延在MgO基板上Mg3 N₂和Zn₃N2的外延膜的生长情况。

Tags

Keywords: Plasma-assisted Molecular Beam Epitaxy Mg3N2 Zn3N2 II-V Compound Semiconductors Anti-bixbyite Crystal Structure MBE Growth MgO Substrate High-temperature Annealing RHEED Quartz Crystal Microbalance Sample Degassing Sample Transfer

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