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Radio Frequency Magnetron Sputtering of Bi2Te3 and Sb2Te3 Thermoelectric Thin Films on Glass Substrates
 

Radio Frequency Magnetron Sputtering of Bi2Te3 and Sb2Te3 Thermoelectric Thin Films on Glass Substrates

Deposition of Bi2Te3 and Sb2Te3 Thin Films on Glass Substrates via RF Sputtering

Article DOI: 10.3791/201298-v • 03:39 min • May 17th, 2024
May 17th, 2024 •
1, 1, 1, 1, 2, 1
1Solar Energy Research Institute (SERI), Universiti Kebangsaan Malaysia, 2Faculty of Science and Technology, Universiti Sains Islam Malaysia

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Keywords: Bi2Te3 Sb2Te3 Thermoelectric Thin Films Radio Frequency Magnetron Sputtering Thin Film Deposition Waste Heat Recovery Thermoelectric Generators N-type P-type
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