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Syntes och karakterisering av hög c-axeln ZnO Thin Film från Plasma Enhanced Chemical Vapor Deposition System och dess UV Ljuskänsliga Application
 
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Syntes och karakterisering av hög c-axeln ZnO Thin Film från Plasma Enhanced Chemical Vapor Deposition System och dess UV Ljuskänsliga Application

Article DOI: 10.3791/53097-v • 08:18 min • October 3rd, 2015
October 3rd, 2015 •
1, 1
1Institute of Manufacturing Technology and Department of Mechanical Engineering, National Taipei University of Technology (TAIPEI TECH)

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Engineering ZnO tunnfilm, plasmaförstärkt CVD dietylzink (DEZn) sensor Pt fingerliknande elektrod ohmsk kontakt UV fotodetektor
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