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Fabrikation af lav temperatur kulstof nanorør Lodrette Interconnect Kompatibel med Semiconductor Technology
 
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Fabrikation af lav temperatur kulstof nanorør Lodrette Interconnect Kompatibel med Semiconductor Technology

Article DOI: 10.3791/53260-v • 09:20 min • December 7th, 2015
December 7th, 2015 •
1, 1
1Department of Microelectronics, Delft University of Technology

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Engineering Carbon nanorør kemisk dampudfældning forbinder halvleder fabrikation katalysator integrerede kredsløb scanning elektronmikroskopi Raman spektroskopi elektrisk karakterisering
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