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Chemistry
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エアロゾルによる金属酸化物の構造の化学蒸着: 酸化亜鉛棒
JoVE Journal
Chemistry
This content is Free Access.
JoVE Journal
Chemistry
Aerosol-assisted Chemical Vapor Deposition of Metal Oxide Structures: Zinc Oxide Rods
Please note that all translations are automatically generated.
Click here for the English version.
エアロゾルによる金属酸化物の構造の化学蒸着: 酸化亜鉛棒
DOI:
10.3791/56127-v
•
06:39 min
•
September 14, 2017
•
Stella Vallejos
2
,
Naděžda Pizúrová
,
Jan Čechal
,
Isabel Gràcia
,
Carles Cané
1
Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC)
,
2
SIX Research Centre
,
Brno University of Technology
,
3
Institute of Physics of Material
,
Academy of Science of Czech Republic
,
4
Institute of Physical Engineering and Central European Institute of Technology
,
Brno University of Technology
Chapters
00:05
Title
00:51
Preparation of Substrates and Set-up of Deposition Temperature
02:08
Preparation of Solution for Aerosol Generation
03:02
Chemical Vapor Deposition Process
04:00
Results: Characterization of Zinc Oxide Rods Deposited on Silicon Substrates via Chemical Vapor Deposition
05:39
Conclusion
Summary
Automatic Translation
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Automatic Translation
棒の形で酸化亜鉛柱状構造は、事前入金触媒シード粒子の使用せずエアゾール援用化学気相蒸着経由で合成されます。このメソッドは、スケーラブルなシリコン、水晶、またはポリマーに基づく様々 な基板に対応。
Tags
Aerosol-assisted Chemical Vapor Deposition
Metal Oxide Structures
Zinc Oxide Rods
Silicon Substrate
Catalyst-free Growth
Low-temperature Deposition
Gas Sensors
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