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Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
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Chapters
- 00:04Title
- 00:56Atomic Layer Deposition (ALD) of Amorphous Vanadium Dioxide (VO2 ) on Sapphire Substrates
- 03:06Annealing Amorphous VO2 Thin Films
- 04:45Characterization of VO2 Films by Raman Spectroscopy
- 05:43Characterization of VO2 Films by X-Ray Photoelectron Spectroscopy (XPS)
- 07:31Morphological Characterization by Atomic Force Microscopy (AFM)
- 09:06Results: Characterization of Amorphousand Crystalline VO2 Films
- 10:49Conclusion
Thin films (100-1000 Å) of vanadium dioxide (VO2) were created by atomic-layer deposition (ALD) on sapphire substrates. Following this, the optical properties were characterized through the metal-insulator transition of VO2. From the measured optical properties, a model was created to describe the tunable refractive index of VO2.
