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JoVE Journal Engineering
Atomically Traceable Nanostructure Fabrication
 

Atomically Traceable Nanostructure Fabrication

Article DOI: 10.3791/52900-v • 12:35 min • July 17th, 2015
July 17th, 2015 •
1, 2, 3, 4, 5, 1, 1, 1, 4, 5, 1, 3, 3, 4, 5, 1, 1
1Zyvex Labs, 2Department of Physics, University of Texas at Dallas, 3Department of Materials Science and Engineering, University of Texas at Dallas, 4Materials Science and Engineering, University of North Texas, 5National Institute of Standards and Technology

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résumé
Automatic Translation

We report a protocol for combining the atomic metrology of the Scanning Tunneling Microscope for surface patterning with selective Atomic Layer Deposition and Reactive Ion Etching. Using a robust process involving numerous atmospheric exposures and transport, 3D nanostructures with atomic metrology are fabricated.

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Keywords: Atomic Scale Nanostructure Fabrication Hydrogen Depassivation Lithography Atomic Layer Deposition Titania Reactive Ion Etching Nanofabrication Process Fiducial Marks Si(100)-H Surface
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