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Tuning Oxide Properties by Oxygen Vacancy Control During Growth and Annealing
 

Tuning Oxide Properties by Oxygen Vacancy Control During Growth and Annealing

Article DOI: 10.3791/58737-v 06:44 min June 9th, 2023
June 9th, 2023

챕터

요약

Oxide materials show many exotic properties that can be controlled by tuning the oxygen content. Here, we demonstrate the tuning of oxygen content in oxides by varying the pulsed laser deposition parameters and by performing postannealing. As an example, electronic properties of SrTiO3-based heterostructures are tuned by growth modifications and annealing.

Tags

Keywords: Oxygen Vacancy Oxide Thin Films Defect Engineering Strontium Titanate Substrate Cleaning Surface Termination Thin Film Deposition Gamma Alumina
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