Waiting
Processando Login

Trial ends in Request Full Access Tell Your Colleague About Jove
Journal / Engineering / Real-Time DC-dynamic Biasing Method for Switching …
JoVE Journal
Engineering

É necessário ter uma assinatura JoVE para assistir este Faça login ou comece sua avaliação gratuita.

JoVE Journal Engineering
Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
 

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

Article DOI: 10.3791/51251-v • 11:44 min • August 15th, 2014
August 15th, 2014 •
1, 2, 3, 1, 3
1Department of Electrical and Computer Engineering, University of California, Davis, 2Digital Light Projection (DLP) Technology Development, Texas Instruments, 3Birck Nanotechnology Center and the Department of Electrical and Computer Engineering, Purdue University

Capítulos

Resumo
Automatic Translation

The robust device design of fringing-field electrostatic MEMS actuators results in inherently low squeeze-film damping conditions and long settling times when performing switching operations using conventional step biasing. Real-time switching time improvement with DC-dynamic waveforms reduces the settling time of fringing-field MEMS actuators when transitioning between up-to-down and down-to-up states.

Tags

Keywords: Real-time DC-dynamic Biasing Switching Time Improvement Underdamped Fringing-field Electrostatic MEMS Actuators Fast Switching Operation Settling Time Transient Applied Bias Waveforms Mechanical Quality Factor Substrate Removal Reliability Stiction Charge Pump CMOS Processing Experimental Validation Switching Time Improvement
Read Article

Get cutting-edge science videos from JoVE sent straight to your inbox every month.

Waiting X
Simple Hit Counter