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JoVE Journal
Engineering

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A Novel Method for In Situ Electromechanical Characterization of Nanoscale Specimens
 

A Novel Method for In Situ Electromechanical Characterization of Nanoscale Specimens

Article DOI: 10.3791/55735-v 07:15 min June 2nd, 2017
June 2nd, 2017

Chapitres

résumé

Isolating electrical and thermal effects on electrically assisted deformation (EAD) is very difficult using macroscopic samples. Metallic sample micro- and nanostructures together with a custom test procedure have been developed to evaluate the impact of applied current on the formation without joule heating and evolution of dislocations on these samples.

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Keywords: Nanoscale TEM In-situ Electromechanical Characterization Silicon Wafer Deep Reactive Ion Etching Silicon Dioxide Copper Foil Photoresist Laser Cutting Ferric Chloride
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