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Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques
 

Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques

Article DOI: 10.3791/57817-v • 06:27 min • July 2nd, 2018
July 2nd, 2018 •
1, 1, 1
1CEITEC BUT, Brno University of Technology

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A protocol for the fabrication of magnetic micro- and nanostructures with spin configurations forming magnetic vortices suitable for transmission electron microscopy (TEM) and magnetic transmission x-ray microscopy (MTXM) studies is presented.

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Fabrication Magnetic Nanostructures Silicon Nitride Membranes Magnetic Vortex Studies Transmission Microscopy Techniques Micro And Nano Structures Observation Transmission Electron Microscopy X-ray Microscopy Advantage Sample Fabrication Nanometer Thin Meena Dhankhar Marek Vanatka Grad Students Hot Plate Bake Moisture Removal Spin Coater PMMA Resist Film Thickness Post-bake Harden Electron Beam Lithography Graphic Database System (GDS) Upload E-beam Writer System Stage And Beam Setup Electron Dose Methyl Isobutyl Ketone
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