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Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques
 

Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques

Article DOI: 10.3791/57817-v • 06:27 min • July 2nd, 2018
July 2nd, 2018 •
1, 1, 1
1CEITEC BUT, Brno University of Technology

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résumé
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A protocol for the fabrication of magnetic micro- and nanostructures with spin configurations forming magnetic vortices suitable for transmission electron microscopy (TEM) and magnetic transmission x-ray microscopy (MTXM) studies is presented.

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Keywords: Magnetic Nanostructures Silicon Nitride Membranes Transmission Microscopy Electron Beam Lithography Electron Beam Evaporation Permalloy Deposition Lift-off Process
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