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Journal / Engineering / 气体夹膜的概念验证，源自爱水的SiO…
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Engineering

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气体夹膜的概念验证，源自爱水的SiO 2/Si/SiO2晶圆，用于绿色海水淡化
 
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气体夹膜的概念验证，源自爱水的SiO 2/Si/SiO2晶圆，用于绿色海水淡化

Article DOI: 10.3791/60583-v • 09:39 min • March 1st, 2020
March 1st, 2020 •
1, 1, 1, 1, 2, 2, 1
1Water Desalination and Reuse Center (WDRC), Biological and Environmental Science and Engineering (BESE) Division, King Abdullah University of Science and Technology (KAUST), 2Core Labs, King Abdullah University of Science and Technology (KAUST)

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此处介绍了一种使用集成电路微加工技术从 SiO2/Si 晶圆中实现气体环膜 （GEM） 的逐步方案。当二氧化硅-GEM浸入水中时，尽管二氧化硅的成分是爱水的，但水的侵入是可以避免的。

Tags

工程， 问题 157， 海水淡化， 直接接触膜蒸馏， 全氟碳无碳膜， 光光刻， 活性电蚀刻， 润湿， 重入功能， 镀铬面罩， 背对齐， 各向异性蚀刻， 蒸汽输送
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